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Ultrasonic Atomizing CVD tube furnace (AACVD)
product introduction：
This device is an aerosol assisted vapor deposition device – AACVD (a precursor of aerosol that USES liquid/gas to grow on the substrate), targeted at fuel cells and ZnO transparent conductive films.
nThis instrument has three main modules: micro flow liquid high precision transmission system, ultrasonic atomization system, 1200℃ tube furnace.
nThis technology is suitable for the use of non-volatile precursor, can be widely used in the preparation of nanomaterials, electrode materials coated composite and other aspects.
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Configuration details
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| system | 1. Liquid flow control system: intermediate high-precision transmission, micro-flow high-precision liquid transmission, flow range: 0.04 ~ 36ml/min; n2. Atomizing device: Equipped with a 2.4MHz ultrasonic atomizer, the liquid can be atomized into liquid particles and imported into the tubular furnace; n3. Heating system (tube furnace can be customized) : the highest temperature can reach 1200℃. |
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| Electrical specifications | AC220V 1.2KW | ||||
| Tmax | 1200 °C | ||||
| Max working temp. | 1100 °C | ||||
| Max heating rate | ≤ 20 ℃/min | ||||
| Length of heating zone | 200mm | ||||
| High precision peristaltic pump | 1. Speed range: 0.1·100rpm reversible; n2. Speed resolution: 0.1 RPM; n3. Speed control mode: film key; n4. Display mode: the 4-bit LED displays the current speed or flow; n5. Strengthen PP material and corrosion resistance; n6. Flow rate: 0.04-36ml/min; n7. Full speed key is set to realize fast empting and adding; n8. With power off memory function, save operation parameters in time. |
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| atomizer | 1.AC220V, 2.4MHz ultrasonic atomizer; n2. The liquid tank is standard made of teflon, corrosion resistant, and sealed with silica gel sealing ring; n3. The atomized outflow velocity can be realized by controlling the gas flowmeter; n4. Atomization for continuous operation. |
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| control system | 1. 15 temperature curves can be stored in advance to avoid the trouble caused by repeated setting of different experimental processes; n2. The experiment process is more intuitive and the operation is more convenient; n3. Wireless control module can be optional to realize remote control; n4. Overtemperature alarm, couple breaking prompt, leakage protection, etc |
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| temperature precision | +/- 1 °C | ||||
| heating element | Mo doped Fe-CR-Al alloy | ||||
| flow control | The standard configuration has a float flow meter with a range of n60-600ml/min (other ranges can be customized by contacting with sales) |
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| net weight | 30KG | ||||
| attention | 1. It is forbidden to open the furnace when the temperature of the equipment furnace is ≥300℃ to avoid injury; n2. When the equipment is in use, the pressure inside the furnace shall not exceed 0.125mpa (absolute pressure) to prevent the sealing flange from being burst by excessive pressure; n3. When used under high vacuum (10-3Pa), the operating temperature of the equipment shall not exceed 800℃. |
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| after-sales service | 1 year warranty, lifetime support (warranty does not cover consumable parts, such as handling tubes and O-rings) | ||||
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