The RF power matching device is small, light and has an air-cooled design. High-quality components and a small number of parts increase reliability and product life, so that your investment and process productivity can be effectively used. An intuitive and fast operation menu (which can be switched on the multi-function front panel of the component and displayed on a 128 x 64 pixel LCD screen) brings incomparable convenience-improves the efficiency of the operator, And minimize training costs. This device is equipped with a 13.56MHz RF output, which can be matched with a common tube furnace for plasma enhanced chemical meteorological deposition (PECVD). It is an ideal choice for laboratory PECVD coatings.
|Name||Power range||Working frequency||Power stability||Reflected power||Protection settings||Cooling method|
|Plasma generator||0-500W Continuously adjustable||13.56MHz||≤2W||70W||DC Over current protection, power amplifier over temperature protection, reflected power protection||Forced air cooling|
|* This equipment can be customized to match the tube furnace|