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PRODUCTS
NBD-103(B)Vacuum System
product introduction：
Product model: nbd-103 (B)
This system USES the molecular pump as the main working pump, 103(B) vacuum system USES the mechanical pump as the molecular pump front stage pump, the mechanical pump has been equipped with the partition exhaust device, it is mainly connected by the pipeline, 103(B) vacuum system molecular pump, mechanical pump, through the standard accessories connected, all stainless steel materials, electropolishing treatment. The system design has the function of pre-extraction.
Technical indicators:
Ambient temperature 5~32℃,
Air relative humidity ≤85%,
Operating voltage: 220V±10% 50~60HZ
Power: 1 kw
Overall ultimate vacuum of the system: 4.3x10pa
Overall size: 850 X600 X 650mm
major dispositions
|
|
device type |
NBD-103(B)system |
NBD-103(C)system |
|
1 |
mechanical pump |
pumping speed：4L/S
power:400w ultimate pressure:6X10-2Pa |
pumping speed：6L/S
power：500W ultimate pressure:6X10-2Pa |
|
2 |
molecular pump
|
pumping rate：100L/S
ultimate pressure：6X10-6Pa starting time：＜2min rated speed：43000rpm Cooling method: air cooling/water cooling |
pumping rate：600L/S
ultimate pressure：6X10-6Pa starting time：＜2min rated speed：27000rpm Cooling method: air cooling/water cooling |
|
3 |
Molecular pump control power supply |
voltage：200~240V
output power：250W acceleration time：3 minutes Output frequency: high speed 704Hz±10% At 430 Hz plus or minus 10%
|
voltage：380~410V
output power：400W acceleration time：3 minutes Output frequency: high speed 704Hz±10% At 430 Hz plus or minus 10%
|
|
4 |
composite vacuum gage |
Operating voltage: 220V 50~60HZ
Resistance value of resistance gauge: approx. 85 ohm Automatic protection (ionization) >10Pa Measurement range of ionization gauge: 100~ 1010-5pa Resistance gauge measurement range: 105 ~ 10-1 pa |
Operating voltage: 220V 50~60HZ
Resistance value of resistance gauge: approx. 85 ohm Automatic protection (ionization) >10Pa Measurement range of ionization gauge: 100~ 1010-5pa Resistance gauge measurement range: 105 ~ 10-1 pa
|
|
5 |
High vacuum manual block valve |
Fluoro ring seal, quick release flange interface The leakage rate is 5X10-9 Pam3/s
|
Fluoro ring seal, quick release flange interface The leakage rate is 5X10-9 Pam3/s
|
|
6 |
connecting line |
All stainless steel, electropolishing, welding leakage rate better than 1× 10-9pa.m3 /s |
All stainless steel, electropolishing, welding leakage rate better than 1× 10-9pa.m3 /s |
