Mass Flow Meter NBD-3Z

Mass Flow Meter NBD-3Z introduction

The gas control system is designed for the control of 3 types of gases flowing through vacuum-sealed tube furnaces at a low cost. The gas control system is installed in a heavy duty mobile cart where the tube furnace can be placed on the top.  The front panel in the system has adjust valves and displays for the flow rate of gases. By combining with CVD tube furnaces,  it can be used as CVD system and annealing furnace to study the gas environmental influence on materials.

Mass Flow meter is widely used in electronic technology equipment, vacuum coating, petrochemical, metallurgical, pharmaceutical, optical melting, analysis measuring instruments,
gas production and gas distribution and other industries.

Mass Flow Meter NBD-3Z parameter

• Product name Mass Flow Meter NBD-3Z
• Model: NBD-3Z
• Flowmeter type: Mass Flow Meter
• gas pipe core: 304 stainless steel
• regulating valve type: solenoid valves
• Normal state of pipeline: closed
• Gas Kinds: 3
• Connector size: 1/4″
• Accuracy: ±1.0%F.S
• Linearity: ±0.5%F.S
• Repeatability: ±0.2%F.S
• Pressure Range: -0.1-0.15 MPa
• A Measuring Range: 0-100SCCM
• B Measuring Range: 0-200SCCM/
• C Measuring Range: 0-500SCCM
• Flow Controling Range: 2%～100%
• Zero Shift: 0.6F.S(15～35℃)
• Response Time: 2S
• Temperature of Working Environment: (15～50℃)
• Temperature of Accuracy Guarantee: (15～35℃)
• power: 220V 50Hz
• Dimensions: L700×W600×H580mm

Mass Flow Meter Application

• Gas flow control in semiconductor manufacturing industry
• Vacuum coating equipment
• Surface treatment of special materials
• Gas burning control
• gas mixing and distribution systems
• gas leakage detecting system
• Environmental testing and analysis equipment
• Gas flow measurement and control of analysis instrument.
• The filed need gas detetion and premise controlling such as chemical, petrochemical, metallurgy, fiber smelting etc.