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CVD Atmosphere Tube Furnace NBD-O1200-60IT-D3ZH
product introduction：
1200℃ CVD vacuum tube furnace is widely used in kinds of CVD experiments which reaction temperature is round 1150 ℃. It is also used for vacuum sintering, vacuum sintering under atmosphere protection, nano materials preparation, battery negative and postive material preparation and other multiple research fields.
1200℃ CVD Atmosphere Tube Furnace Application:
1200℃ CVD Atmosphere Tube Furnace is widely used in kinds of CVD experiments which reaction temperature is round 1150 ℃. It is also used for vacuum sintering, vacuum sintering under atmosphere protection, nano materials preparation, battery material preparation and other multiple research fields.
Main part of CVD Atmosphere Tube Furnace system
- 1200℃ CVD tube furnace
- Three channel mass flow meter
- NBD-4C vacuum pump
- Vacuum connecting pipe with thick-walled silicone tube
1200℃ single zone three channel gas CVD tube furnace system technical data:
| 1 | Product name | 1200℃ single zone three channel gas CVD system |
| 2 | model | NBD-O1200-50IT150-D3ZH |
| 3 | NBD-O1200-60IT150-D3ZH | |
| 4 | NBD-O1200-80IT150-D3ZH | |
| 5 | NBD-O1200-100IT150-D3ZH | |
| 6 | Chamber type | Open |
| 7 | Displaying mode | LED displaying |
| 8 | Chamber material | Imported alumina fiber |
| 9 | Heating element | imported alloy heating wire |
| 10 | Max. Temperature | 1200℃ |
| 11 | Working temperature | ≤1150℃ |
| 12 | Heating rate | ≤20℃(adviced:10℃/min) |
| 13 | Heating zone | single |
| 14 | Length of temperature zone | 440mm |
| 15 | Length of constant temperature zone | 220mm |
| 16 | Tube material | High purity quartz tube |
| 17 | Tube diameter | 50mm |
| 18 | 60mm | |
| 19 | 80mm | |
| 20 | 100mm | |
| 21 | Tube length | 1000mm |
| 22 | Sealing method | high vacuum stainless steel flange |
| 23 | Gas tightness | Gas tightness of vacuum flange and quartz tube can reach to 4.03×10-3Pa. |
| 24 | Controlling mode | smart PID multiple segments programmable controlling |
| 25 | Accuracy | ±1℃ |
| 26 | Temperature curve | multiple segments“time-temperature curve” |
| 27 | Presetting curve | 15pcs |
| 28 | Over temperature alarm | yes |
| 29 | Over-current protection | yes |
| 30 | broken thermocouple prompt | yes |
| 31 | Thermocouple | K type |
| 32 | Certification | CE |
| 33 | voltage | 220V 50Hz～60Hz |
| 34 | power | 2.5KW |
| 35 | Gas channel | three |
| 36 | Flow meter | Mass flow meter |
| 37 | A channel range | 10～100ml/min |
| 38 | B channel range | 16～160ml/min |
| 39 | C channel range | 25～250ml/min |
| 40 | Pressure of gas channel | -0.1～0.15 MPa |
| 41 | Vacuum degree | 5～10Pa(If require other vacuum degree, it need to choose different vacuum device) |
| 42 | Connection of pump pipe | KF16 stainless steel bellows, KF16 quick clamp,KF16 flapper valve |
| 43 | Vacuum gauge | standard mechanical vacuum gauge, optional electronic vacuum gauge |
| 44 | Warranty | 12 months limited warranty |
| 45 | Package | Plywood case |
| 46 | Standard accessories | Quartz tube, Vacuum Flange, Tube Block, O-ring, crucible tongs, manual book, PTFE hose, stainless steel quick clamp,stainless steel bellows , KF adapter, 5mm Allen wrench |
| 47 | Dimensions | 700mmx600mmx1190mm |
