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- Address: Kibbutz Zikim, Israel
- Phone: 972-8-9122667
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PRODUCTS
CVD system O1200-XIITD2F
product introduction：
Chemical vapor deposition (CVD) refers to a method of chemical gas or steam reacting on the surface of a substrate to synthesize a coating or nanomaterial. It is the most widely used technology for depositing thin film materials in the semiconductor industry, including a wide range of insulating materials Most metal materials and metal alloy materials. To this end, we have developed a complete set of CVD coating systems, which are suitable for major universities, material laboratories, scientific research institutes, environmental protection science and other fields;
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Configuration details
| System specification | |||||||||
| Model | NBD-O1200-XIIT（Furnace tube diameter 50、60、80、100mm Optional） | ||||||||
| Operating temperature | ≤1150℃ | ||||||||
| Heating zone size | 200mm+200mm（Dual temperature and dual control） | ||||||||
| Heating rate | ≤20℃/min | ||||||||
| Electrical Specifications | AC 220V 4KW | ||||||||
| Gas system (optional) | Flowmeter type | Float flowmeter | Mass flowmeter | ||||||
| Pipeline schematic | |||||||||
| Number of intake ports | 2、3、4（Multiple options） | ||||||||
| Flow range | 20-250/20-800ml/min(Multi-range optional) | 50/100/200sccm(Multi-range optional) | |||||||
| Working pressure range | 0-0.15MPa | ||||||||
| Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
| Pumping rate | 1L/s | 3L/s | 4L/s | ||||||
| Inlet and exhaust port size | Φ8mm | Φ8mm | KF16/25 | ||||||
| Ultimate pressure | 1000Pa | 100Pa | 10Pa | ||||||
| Ambient temperature | 5-40℃ | ||||||||
| Electrical Specifications | AC220V | ||||||||
| High vacuum system (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
| Pumping rate | 110L/s | 600L/s | 700L/s | ||||||
| Vacuum gauge | Compound vacuum gauge | ||||||||
| Ultimate pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
| Ambient temperature | 5-40℃ | ||||||||
| Electrical Specifications | AC 220V | AC 220V | AC 380V | ||||||
| * Support non-calibration, more models, welcome to call 400-000-3746 | |||||||||
