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CVD Atmosphere Tube Furnace NBD-T1700-60IT-D3ZH
product introduction：
1700℃ CVD vacuum tube furnace is widely used in kinds of CVD experiments which reaction temperature is round 1650 ℃. It is also used for vacuum sintering, vacuum sintering under atmosphere protection, nano materials preparation, battery negative and postive material preparation and other multiple research fields.
CVD Atmosphere Tube Furnace Introduction
1700℃ CVD tube furnace system is widely used in kinds of CVD experiments which reaction temperature is round 1650 ℃. It is also used for vacuum sintering, vacuum sintering under atmosphere protection, nano materials preparation, Li-battery material preparation and other multiple research fields.
The ultimate vacuum degree of this system is 5-10 pa. If require other vacuum degree, it need to choose different vacuum device.
Gas mixing system of this system is three channel mass flow meter.
Main part of CVD Atmosphere Tube Furnace system
- 1700℃ single zone tube furnace
- Three channel mass flow meter
- NBD-4C vacuum pump
1700℃ single zone three channel gas CVD tube furnace system technical data:
| 1 | Product name | 1700℃ single zone three channel gas CVD system |
| 2 | Model | NBD-T1700-50IT-D3ZH |
| 3 | NBD-T1700-60IT-D3ZH | |
| 4
|
NBD-T1700-80IT-D3FH | |
| 5 | Chamber type | closed |
| 6 | Displaying mode | LED displaying |
| 7 | Chamber material | Imported alumina fiber |
| 8 | Heating element | MoSi2 rod |
| 9 | Max. Temperature | 1700℃ |
| 10 | Working temperature | ≤1650℃ |
| 11 | Heating rate | ≤20℃(adviced:10℃/min) |
| 12 | Heating zone | single |
| 13 | Length of temperature zone | 240mm |
| 14 | Length of constant temperature zone | 120mm |
| 15 | Tube material | High purity alumina |
| 16 | Tube diameter | 50mm |
| 17 | 60mm | |
| 18 | 80mm | |
| 19 | Tube length | 1000mm |
| 20 | Sealing method | high vacuum stainless steel flange |
| 21 | Gas tightness | Gas tightness of vacuum flange and quartz tube can reach to 4.03×10-3Pa. |
| 22 | Controlling mode | smart PID multiple segments programmable controlling |
| 23 | Accuracy | ±1℃ |
| 24 | Temperature curve | multiple segments“time-temperature curve” |
| 25 | Presetting curve | 10pcs |
| 26 | Over temperature alarm | yes |
| 27 | Over-current protection | yes |
| 28 | broken thermocouple prompt | yes |
| 29 | Thermocouple | B type |
| 30 | Certification | CE |
| 31 | voltage | 220V 50Hz～60Hz |
| 32 | power | 4 KW |
| 33 | Gas channel | three |
| 34 | Flow meter | Mass flow meter |
| 35 | A channel range | 10～100ml/min |
| 36 | B channel range | 16～160ml/min |
| 37 | C channel range | 25～250ml/min |
| 38 | Pressure of gas channel | -0.1～0.15 MPa |
| 39 | Vacuum degree | 5～10Pa(If require other vacuum degree, it need to choose different vacuum device) |
| 40 | Connection of pump pipe | KF16 stainless steel bellows, KF16 quick clamp,KF16 flapper valve |
| 41 | Vacuum gauge | standard mechanical vacuum gauge, optional electronic vacuum gauge |
| 42 | Warranty | 12 months limited warranty |
| 43 | Package | Plywood case |
| 44 | Standard accessories | Alumina tube, Vacuum Flange, Tube Block, O-ring, protective goves, crucible tongs, manual book, PTFE hose, stainless steel quick clamp,stainless steel bellows , KF adapter, 5mm Allen wrench |
| 45 | Dimensions | 700mmx600mmx1105mm |
