1200℃Three temperature zone type tube furnace
In order to meet the requirements of various CVD processes, we have integrated the control instruments of multiple temperature zones into the intelligent control system. You only need to click the touch screen to complete all the parameter Settings.While satisfying the gradient control of different temperature zones, multiple temperature zones can be set as the same temperature point, which can be used as extended single temperature zone.It continues the classic design of open tube furnace, beautiful and practical!
| 1. Double steel structure;
n2. High purity Al2O3 fiber refractory insulation material, the maximum energy saving;
n3. The high purity alumina coating on refractory ceramics can prolong the service life.
n4. The alumina tube plug helps you create custom temperature gradients in the tube.
|Electrical specifications||AC380V 2KW+4KW+2KW|
|The highest temperature||1200 ℃ （<1H）|
|Continuous temperature||1100 ℃|
|Maximum heating rate||≤ 20 ℃/min|
|Heating zone length||200mm+400mm+200mm(three temperature and three control: each temperature zone can operate independently)|
|The furnace pipe size||Φ50*1400mm||Φ60*1400mm||Φ80*1400mm||Φ100*1400mm|
|Control system||1. 15 temperature curves can be stored in advance to avoid the trouble caused by repeated Settings of different experimental processes;
n2. The experimental process is more intuitive and the operation is more convenient;
n3. Wireless control module can be selected to realize remote control;
n4. It has the functions of over temperature alarm, broken couple prompt, leakage protection and so on.
|The temperature precision||+/- 1 ℃|
|Heating element||Mo – doped fe-cr-al alloy|
|Vacuum degree: ≤10Pa (mechanical pump)|
|Pressure measurement and monitoring||Mechanical pressure gauges with damping oil are used to reduce the back and forth swing of the pointer.|
|Gas supply system||The float flowmeter is used to control the gas velocity, which is integrated with the equipment for easy control.|
|The net weight||90KG|
|Equipment precautions||1. When the furnace temperature of the equipment is ≥300℃, do not open the furnace to avoid damage;
n2. When the equipment is in use, the pressure inside the furnace shall not exceed 0.125mpa (absolute pressure) to prevent damage caused by excessive pressure;
n3. When used under high vacuum (10 to the minus 3 Pa), the operating temperature of the equipment shall not exceed 800℃.
|Service support||1 year warranty with lifetime support (warranty excludes consumable parts such as furnace tubes and o-rings)|