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Multi heating zone CVD system

Release time: 2024-07-10 03:41:12 Number of views: 126

220190 (1)

Equipment introduction:
Multi-temperature zone CVD system integrated furnace, flexible combination of gas supply and vacuum system, to meet all kinds of film deposition, is widely used in semiconductor industry. Including the deposition of large areas of insulation, as well as most metal materials and metal alloy materials. The complete set of CVD coating system of Nobardi is suitable for material laboratories, scientific research institutes, environmental science and other fields in universities.

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Equipment introduction:
Multi-temperature zone CVD system integrated furnace, flexible combination of gas supply and vacuum system, to meet all kinds of film deposition, is widely used in semiconductor industry. Including the deposition of large areas of insulation, as well as most metal materials and metal alloy materials. The complete set of CVD coating system of Nobardi is suitable for material laboratories, scientific research institutes, environmental science and other fields in universities.

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  Specifications

 

1. Adopt high purity quartz or stainless steel furnace tube, excellent corrosion resistance and high temperature resistance;
2. High purity Al2O3 fiber refractory insulation material, excellent insulation effect, reduce the power consumption of equipment;
3. The furnace body adopts double-layer air-cooled structure technology, and the upper cover is opened by automatic lifting system;
4.NBD-101EP embedded operating system Chinese and English interchange graphical interface, 7 inch real color touch screen input, intelligent man-machine dialogue mode, real-time heating power display, non-linear pattern temperature correction; The experimental report is generated independently, and the experimental data is exported for unlimited times.
5. Integrated equipment includes multi-channel air supply system, multi-temperature zone heating system and high vacuum system.

Number of heating-zone

3

4

5

6

Tube size

Ø25/Ø50/Ø60/Ø80/Ø100*1600mm

Max working temps.

≤1150℃

Heating zone selection

(Customizable)

200mm*3

200+300+200mm

200+400+200mm

300mm*3

300+400+300mm

200mm*4

200+300+300+200mm

200+400+400+200mm

300mm*4

300+400+400+300mm

200mm*5

300mm*5

200mm*6

300mm*6

Heating rate

≤20℃/min

Electrical Specifications

AC380V 6~10KW

AC380V 8~14KW

AC380V 10~15KW

AC380V 12~18KW

Gas system (optional)

 

Piping diagram

  

Number of intake ports

2、3、4(Multiple options available)

Traffic range

20-250/20-800ml/min……(Multiple ranges available)

50/100/200/500sccm……(Multiple ranges available)

Working pressure range

0-0.15MPa

Low vacuum system (optional)

Vacuum pump model

NBD-3C/NBD-4C

Pumping speed

3L/s或4L/s

Inlet and outlet port size

KF16/25

System vacuum

3~5Pa(Vacuum pump ultimate vacuum 6.2*10^-2 Pa)

Working environment temperature

5-40℃

Electrical specifications

AC220V

高真空系统(可选购)

Vacuum pump model

NBD-103(A)

NBD-103(B)

Pumping speed

110L/s

600L/s

Vacuum gauge

Compound vacuum gauge

System vacuum

4.310^-3Pa

6*10^-4Pa

Working temperature

5-40℃

Electrical specifications

AC 220V

AC 380V

* 支持非标定做,更多型号,欢迎来电垂询400-000-3746


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