For equipment enquiries and technical assistance, email oremir15@outlook.com.
Equipment introduction:
Multi-temperature zone CVD system integrated furnace, flexible combination of gas supply and vacuum system, to meet all kinds of film deposition, is widely used in semiconductor industry. Including the deposition of large areas of insulation, as well as most metal materials and metal alloy materials. The complete set of CVD coating system of is suitable for material laboratories, scientific research institutes, environmental science and other fields in universities.
Equipment introduction:
Multi-temperature zone CVD system integrated furnace, flexible combination of gas supply and vacuum system, to meet all kinds of film deposition, is widely used in semiconductor industry. Including the deposition of large areas of insulation, as well as most metal materials and metal alloy materials. The complete set of CVD coating system of is suitable for material laboratories, scientific research institutes, environmental science and other fields in universities.
Specifications
1. Adopt high purity quartz or stainless steel furnace tube, excellent corrosion resistance and high temperature resistance; | ||||||||||||||||
Number of heating-zone | 3 | 4 | 5 | 6 | ||||||||||||
Tube size | Ø25/Ø50/Ø60/Ø80/Ø100*1600mm | |||||||||||||||
Max working temps. | ≤1150℃ | |||||||||||||||
Heating zone selection (Customizable) | 200mm*3 200+300+200mm 200+400+200mm 300mm*3 300+400+300mm | 200mm*4 200+300+300+200mm 200+400+400+200mm 300mm*4 300+400+400+300mm | 200mm*5 300mm*5 | 200mm*6 300mm*6 | ||||||||||||
Heating rate | ≤20℃/min | |||||||||||||||
Electrical Specifications | AC380V 6~10KW | AC380V 8~14KW | AC380V 10~15KW | AC380V 12~18KW | ||||||||||||
Gas system (optional) | ||||||||||||||||
Piping diagram | ||||||||||||||||
Number of intake ports | 2、3、4(Multiple options available) | |||||||||||||||
Traffic range | 20-250/20-800ml/min……(Multiple ranges available) 50/100/200/500sccm……(Multiple ranges available) | |||||||||||||||
Working pressure range | 0-0.15MPa | |||||||||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-3C/NBD-4C | ||||||||||||||
Pumping speed | 3L/s or 4L/s | |||||||||||||||
Inlet and outlet port size | KF16/25 | |||||||||||||||
System vacuum | 3~5Pa(Vacuum pump ultimate vacuum 6.2*10^-2 Pa) | |||||||||||||||
Working environment temperature | 5-40℃ | |||||||||||||||
Electrical specifications | AC220V | |||||||||||||||
High-Vacuum System (optional) | Vacuum pump model | NBD-103(A) | NBD-103(B) | |||||||||||||
Pumping speed | 110L/s | 600L/s | ||||||||||||||
Vacuum gauge | Compound vacuum gauge | |||||||||||||||
System vacuum | 4.310^-3Pa | 6*10^-4Pa | ||||||||||||||
Working temperature | 5-40℃ | |||||||||||||||
Electrical specifications | AC 220V | AC 380V | ||||||||||||||
* Custom configurations and additional models are available. Email oremir15@outlook.com for details. | ||||||||||||||||
DisclaimerProduct images, descriptions, and technical specifications are for reference only. Details may change or differ from the current equipment. Please confirm requirements and specifications by email. This information does not constitute an offer or commitment.Please confirm current specifications by email. This information does not constitute an offer or commitment.information without prior notice.