Main features:

1, the maximum output power of RF power supply: 500W (continuously adjustable), the maximum reflected power 70W;

2. Excellent electromagnetic shielding scheme, efficient and safe!

3, special-shaped high purity quartz furnace tube, large capacity reaction space;

4, unique rotation (60 precision design) pendulum structure, to ensure the material and plasma full contact;

5, three high precision mass flowmeter (can be customized according to requirements), integrated gas mixing system;

6. Unique inlet and outlet design ensures convenient inlet and outlet of equipment under complex structure;

7, RF system, vacuum system, rotary pendulum system is fully integrated in one, 7 inch full touch screen operation, easy to operate, intuitive;

8, can save six groups of process parameters, at any time to call;

9, the experimental data can be automatically screenshot, and support USB interface export.

Electrical Spec

AC220V    1.5KW

Equipment Dimensions

W1300mm×H1250mm×D760mm；

Φ120*L300mm (customizable; three mixing baffles welded inside the tube), tube diameter outside the RF zone: φ60mm.

Rotation Speed

0.1～6 rpm (stepless speed control)

Tilting Angle

-3°～+3°; maximum tipping angle 30°

Reaction Chamber Pressure

5~80pa

Flange Configuration

Quick-Opening Aerospace Aluminum Configuration

Operating System

NBD-101EP integrated central-bus control system with a 7-inch full-color touchscreen, intelligent fuzzy PID control, and interactive controls.

Electric Actuator Power

50W 

RF Power Supply

Output power 10～500W, continuously adjustable; RF frequency: 13.56MHz ±0.005%; fully automatic matching.

Vacuum Test

Digital Vacuum Gauge Acquisition Unit

Vacuum Generation

NBD-4C mechanical vacuum pump (220V/50Hz), power: 0.4KW, pumping speed: 4m³/h.

Gas Supply System

Mass flow controller (range and calibration customizable), accuracy: ±1%F.S; response time: 1-4s.

Equipment Details

Interface Examples

Control System

Net Weight

Approximately 320KG

Operating Precautions

1. The RF matching unit normally operates in automatic mode; matching generally requires power above 50W.
2. For manual matching, set power to about 60W, tune for a suitable match, then increase power.
3. Before changing chamber gas flow during operation, first set power to zero. Do not directly press OFF to stop the RF output.

Service and Support

1 year limited warranty with lifetime support.