CVD System O1200-MINI-G3Z

Release time: 2024-07-10 03:41:12 Number of views: 126

CVD系统__副本 (1)

Equipment Introduction:

Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental science, and other fields.

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Equipment Introduction:

Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental science, and other fields.

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Configuration details

 

NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-machine dialogue mode, non-linear temperature correction.

Product Model

O1200-MINI-G3Z

Reach the temperature

≤1150℃

Heating zone size

200mm

Heating rate

≤20℃/min

Electrical specifications

AC220V  1.2KW

Gas system (optional)

Types of flow meters

Float flow meter

Mass flow meter

Piping diagram

  

Number of intake ports

2、3、4(Multiple options available)

Traffic range

20-250/20-800ml/min(Multiple ranges available)

50/100/200sccm(Multiple ranges available)

Working pressure difference range

0-0.15MPa

Low vacuum system (optional)

Vacuum pump model

NBD-1.5C

NBD-3C

NBD-4C

Pumping speed

1L/s

3L/s

4L/s

Inlet and outlet port dimensions

Φ8mmTower Coupling

Φ8mmTower Connector

KF16/25

Extreme pressure

1000Pa

100Pa

10Pa

Working temperature

5-40℃

Electrical specifications

AC220V

High-Vacuum System (optional)

Vacuum Pump Model

NBD-103(A)

NBD-103(B)

NBD-103(C)

Pumping Speed

110L/s

600L/s

700L/s

Vacuum Gauge

Combined Vacuum Gauge

Ultimate Pressure

10^-3Pa

10^-4Pa

10^-5Pa

Operating Temperature

5-40℃

Electrical Specifications

AC 220V

AC 220V

AC 380V

* Custom configurations and additional models are available. Email oremir15@outlook.com for details.

Product images, descriptions, and technical specifications are for reference only. Details may change or differ from the current equipment. Please confirm requirements and specifications by email. This information does not constitute an offer or commitment.Please confirm current specifications by email. This information does not constitute an offer or commitment.information without prior notice.

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