Equipment Introduction:
Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental science, and other fields.
Equipment Introduction:
Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental science, and other fields.
Configuration details
NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-machine dialogue mode, non-linear temperature correction. | |||||||||
Product Model | O1200-MINI-G3Z | ||||||||
Reach the temperature | ≤1150℃ | ||||||||
Heating zone size | 200mm | ||||||||
Heating rate | ≤20℃/min | ||||||||
Electrical specifications | AC220V 1.2KW | ||||||||
Gas system (optional) | Types of flow meters | Float flow meter | Mass flow meter | ||||||
Piping diagram | |||||||||
Number of intake ports | 2、3、4(Multiple options available) | ||||||||
Traffic range | 20-250/20-800ml/min(Multiple ranges available) | 50/100/200sccm(Multiple ranges available) | |||||||
Working pressure difference range | 0-0.15MPa | ||||||||
Low vacuum system (optional) | Vacuum pump model | NBD-1.5C | NBD-3C | NBD-4C | |||||
Pumping speed | 1L/s | 3L/s | 4L/s | ||||||
Inlet and outlet port dimensions | Φ8mmTower Coupling | Φ8mmTower Connector | KF16/25 | ||||||
Extreme pressure | 1000Pa | 100Pa | 10Pa | ||||||
Working temperature | 5-40℃ | ||||||||
Electrical specifications | AC220V | ||||||||
High-Vacuum System (optional) | Vacuum Pump Model | NBD-103(A) | NBD-103(B) | NBD-103(C) | |||||
Pumping Speed | 110L/s | 600L/s | 700L/s | ||||||
Vacuum Gauge | Combined Vacuum Gauge | ||||||||
Ultimate Pressure | 10^-3Pa | 10^-4Pa | 10^-5Pa | ||||||
Operating Temperature | 5-40℃ | ||||||||
Electrical Specifications | AC 220V | AC 220V | AC 380V | ||||||
* Custom configurations and additional models are available. Email oremir15@outlook.com for details. | |||||||||
Product images, descriptions, and technical specifications are for reference only. Details may change or differ from the current equipment. Please confirm requirements and specifications by email. This information does not constitute an offer or commitment.Please confirm current specifications by email. This information does not constitute an offer or commitment.information without prior notice.