Chemical vapor deposition CVD all-in-one machine

Release time: 2024-07-10 03:41:12 Number of views: 126

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Equipment Introduction:

A multi-channel liquid gas phase generator is a device used to convert liquid into gas phase, capable of processing multiple liquid samples simultaneously. Each channel is independently controlled and suitable for batch sample processing. Widely used in various fields such as chemical analysis, environmental monitoring, pharmaceutical industry, materials science, etc.

This device converts liquid samples into stable gas phase output by precisely controlling the evaporation process of the liquid, making it suitable for experimental and industrial applications that require high-precision gas phase supply.

Application areas:

1. Chemical analysis: an injection system used for analytical instruments such as gas chromatography (GC) and mass spectrometry (MS).

2. Environmental monitoring: used for detecting volatile organic compounds (VOCs) in air pollutants and water quality analysis.

3. Pharmaceutical industry: used for drug composition analysis, drug stability research, etc.

4. Materials Science: Used for the analysis of volatile components in materials such as polymers and coatings.

5. Food Science: Used for the analysis of food aroma and flavor components.

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Equipment Overview:

Chemical vapor deposition (CVD) forms coatings or nanomaterials by reacting gases or vapors at a substrate surface. It is widely used in the semiconductor industry to deposit thin films, including insulating materials, metals, and metal alloys. Complete CVD coating systems are available for university materials laboratories, research institutes, environmental science, and related applications.

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Technical Specifications: 

 

1. The furnace and control system are integrated for convenient, straightforward experiments.

2. The gas-mixing circuit can use rotameters or mass flow meters, with gas flow set individually.

3. Precise multi-segment PID program control monitors temperature and time across different process stages.

4. The lining uses lightweight, high-purity alumina fiber for effective thermal insulation.

5. A mechanical or molecular vacuum pump can be fitted for different vacuum conditions.

Product Model

 

NBD-T1700-80TIG3Z

Operating Temperature

 

≤1650℃

Heating Zone Dimensions

 

310mm

Uniform Temperature Zone Dimensions 220mm

Heating Rate

 

≤20℃/min

Electrical Specifications

 

AC 220V  4.5KW

Control System 

1. Sintering profile settings: dynamically displays the configured profile, stores multiple process profiles, and allows each profile to be set individually.
2. Scheduled sintering supports unattended execution of the programmed profile.
3. Displays sintering power, voltage, and other information in real time, records process data, and supports export for paperless records.
4. Supports remote operation and real-time equipment status monitoring.
5. Temperature correction: nonlinearly corrects the difference between the main control temperature and sample temperature throughout sintering.

Gas System (optional)

 

Flow Meter Type

Rotameter

Mass Flow Meter

Piping Diagram

 

 

Number of Gas Inlet Connections

2, 3, 4 (multiple channels available)

Flow Range

20-200/60-600l/min (multiple ranges available)

50/100/200sccm (multiple ranges available)

Operating Differential Pressure Range

0-0.15MPa

Low-Vacuum System (optional)

Vacuum Pump Model

NBD-1.5C

NBD-3C

NBD-4C

Pumping Speed

1L/s

3L/s

4L/s

Gas Inlet and Outlet Size

Φ8mm barbed fitting

Φ8mm barbed fitting

KF16/25

Ultimate Pressure

1000Pa

100Pa

10Pa

Operating Temperature

5-40℃

Electrical Specifications

AC220V

High-Vacuum Molecular Pump System

(optional)

Molecular Pump System Model

NBD-103(A)

NBD-103(B)

NBD-103(C)

Pumping Speed

110L/s

600L/s

700L/s

Vacuum Gauge

Combined Vacuum Gauge

Ultimate Pressure

10^-3Pa

10^-4Pa

10^-5Pa

Operating Temperature

5-40℃

Electrical Specifications

AC 220V

AC 220V

AC 380V

* Custom configurations and additional models are available. Email oremir15@outlook.com for details.

Product images, descriptions, and technical specifications are for reference only. Details may change or differ from the current equipment. Please confirm requirements and specifications by email. This information does not constitute an offer or commitment.Please confirm current specifications by email. This information does not constitute an offer or commitment.information without prior notice.

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