Ultrasonic Atomizing CVD tube furnace (AACVD)
This device is an aerosol assisted vapor deposition device – AACVD (a precursor of aerosol that USES liquid/gas to grow on the substrate), targeted at fuel cells and ZnO transparent conductive films.
nThis instrument has three main modules: micro flow liquid high precision transmission system, ultrasonic atomization system, 1200℃ tube furnace.
nThis technology is suitable for the use of non-volatile precursor, can be widely used in the preparation of nanomaterials, electrode materials coated composite and other aspects.
|system||1. Liquid flow control system: intermediate high-precision transmission, micro-flow high-precision liquid transmission, flow range: 0.04 ~ 36ml/min;
n2. Atomizing device: Equipped with a 2.4MHz ultrasonic atomizer, the liquid can be atomized into liquid particles and imported into the tubular furnace;
n3. Heating system (tube furnace can be customized) : the highest temperature can reach 1200℃.
|Electrical specifications||AC220V 1.2KW|
|Max working temp.||1100 °C|
|Max heating rate||≤ 20 ℃/min|
|Length of heating zone||200mm|
|High precision peristaltic pump||1. Speed range: 0.1·100rpm reversible;
n2. Speed resolution: 0.1 RPM;
n3. Speed control mode: film key;
n4. Display mode: the 4-bit LED displays the current speed or flow;
n5. Strengthen PP material and corrosion resistance;
n6. Flow rate: 0.04-36ml/min;
n7. Full speed key is set to realize fast empting and adding;
n8. With power off memory function, save operation parameters in time.
|atomizer||1.AC220V, 2.4MHz ultrasonic atomizer;
n2. The liquid tank is standard made of teflon, corrosion resistant, and sealed with silica gel sealing ring;
n3. The atomized outflow velocity can be realized by controlling the gas flowmeter;
n4. Atomization for continuous operation.
|control system||1. 15 temperature curves can be stored in advance to avoid the trouble caused by repeated setting of different experimental processes;
n2. The experiment process is more intuitive and the operation is more convenient;
n3. Wireless control module can be optional to realize remote control;
n4. Overtemperature alarm, couple breaking prompt, leakage protection, etc
|temperature precision||+/- 1 °C|
|heating element||Mo doped Fe-CR-Al alloy|
|flow control||The standard configuration has a float flow meter with a range of
n60-600ml/min (other ranges can be customized by contacting with sales)
|attention||1. It is forbidden to open the furnace when the temperature of the equipment furnace is ≥300℃ to avoid injury;
n2. When the equipment is in use, the pressure inside the furnace shall not exceed 0.125mpa (absolute pressure) to prevent the sealing flange from being burst by excessive pressure;
n3. When used under high vacuum (10-3Pa), the operating temperature of the equipment shall not exceed 800℃.
|after-sales service||1 year warranty, lifetime support (warranty does not cover consumable parts, such as handling tubes and O-rings)|