NBD LABS ISRAEL PROFESSIONAL TOP SERVICE
NBD LABS ISRAEL PROFESSIONAL TOP SERVICE
NBD LABS ISRAEL PROFESSIONAL TOP SERVICE

PRODUCTS

PECVD system

product introduction:

The product is composed of a solid plasma source, a gas proton flow control system, a substrate temperature control system, and a vacuum system. The Nobody operating software uses centralized bus control technology. It is suitable for the deposition of SiO2 and SiNx thin films under the conditions of room temperature to 1200 ° C. It can also realize the deposition of TEOS source, SiC film layer and liquid gaseous source deposition,Damage the deposition of passivation film.

Configuration details

1. Clean the coating in one go, to prevent secondary pollution;
n2. The upper opening type structure is convenient for observing the sample;
n3. The product adopts automatic control mode, touch screen, digital display;
n4. High degree of equipment integration;
n5. Stable RF power supply, uniform temperature distribution, improve film formation quality;
Model NBD-PECVD1200-80IT
Electrical Specifications AC220V    4KW
Max temperature 1200 ℃
Operating temperature ≤ 1150 ℃
Heating rate ≤  20 ℃/min
RF power supply 500W /13.56MHz
Tube size Φ80*1200mm
Deposition diagram As shown: This is a schematic diagram of the equipment deposition process
Control System 1. Adopt fully automatic control mode, real-time display of various data of the equipment with touch screen;
n
n2. The experimental process is more intuitive and the operation is more convenient;
n3. With over-temperature alarm, broken couple reminder, leakage protection and other functions.
Temperature control accuracy +/- 1 ℃
Heating element Mo-Fe-Cr-Al alloy
Sealing system
Vacuum:≤10Pa(Mechanical pump)
Pressure measurement and monitoring The use of a digital display vacuum gauge can make the equipment vacuum more intuitive and the experimental results more accurate.
Gas supply system Two-way proton flowmeter is used to accurately control the gas flow rate, and integrated with the equipment;
Net weight 360KG
Notes on equipment use 1. When the equipment is used, the pressure in the furnace tube must not exceed 0.125MPa (absolute pressure) to prevent the equipment from being damaged due to excessive pressure;
n2. When using under high vacuum (10 minus 3 to the power Pa), the equipment temperature should not exceed 800 ℃.
Service support 1 year warranty, providing life-long support (the warranty does not include consumable parts, such as furnace tubes and sealing rings, etc.).