Ion sputtering coating instrument
NBD-LJ10 is specially designed for scanning electron microscopy to produce samples. It has the characteristics of simple structure and convenient use. It does not require a high degree of vacuum to ion scan the SEM sample, so it can be used as the basic equipment for SEM sample coating.
1. Adopt 2C silent vacuum pump to reduce noise in all aspects and enhance experiment experience;
n2. Standard sample chamber vacuum meter and sputtering ammeter, real-time display and monitoring instrument status;
n3. The edge rubber seal ring, long-term use will not cause the glass bell jar “breaking edge” phenomenon that affects the vacuum of the sample sputtering chamber.
n4. Configure sputtering current controller and micro vacuum gas valve. Combined with the automatic control circuit, it is easy to control the pressure and ionization current of the vacuum chamber, and the ionization gas can be arbitrarily selected to obtain a good coating effect;
n5. Standard Φ58mm x 0.12mm large size pure gold target, the sputtering range is larger;
n1.Glass processing room: Φ105 * 130mm;
n2.Sample table size: Φ40nn can hold 6 samples at the same time;
n3.Gold target size: Φ58 * 0.12mm.
n4.Vacuum testing: Peelmeter;
n5.Vacuum protection: 20Pa is equipped with a micro inflation valve to adjust the working vacuum;
n6.Working medium gas in the studio: air or argon, equipped with special argon gas inlet and micro-inflation adjustment;
n7.Sputtering materials: iron, cobalt, erbium;